Director of the Lutz Microfabrication Cleanroom
Associate Professor of Electrical Engineering
University of Louisville
walsh@louisville.edu
Dr. Walsh and one of his personal micro-machinists.
EDUCATION
Ph.D., Microelectronics, University of Cincinnati, Aug 92
M. Eng., Electrical Engineering, University of Louisville, Dec 85
BSEE, Electrical Engineering, University of Louisville, May 78
PROFESSIONAL EXPERIENCE
1996-Present, Associate Professor, Electrical Engineering, University of Louisville
1993-1996, Assistant Professor, Electrical Engineering, University of Louisville
1986-1993, Instructor, Electrical Engineering, University of Louisville
1980-1986, Instructor, Engineering Math and Computer Science, University of Louisville
1976-1977, Cooperative Internship, General Electric Appliance Park
RESEARCH INTERESTS
Microelectromechanical devices (MEMS), sensors and transducers, actuators,
bulk and surface micromachining, anisotropic etching, microelectronic fabrication,
electrostatic bonding, electrochemical etching, silicon-silicon bonding,
piezoresistive effects in silicon, microaccelerometers, packaging, finite
element modeling and analysis, device and process simulation, device physics,
signal conditioning, temperature compensation, microprocessor applications,
and VLSI design.
COURSES TAUGHT
Microfabrication
(EE 500), Physical Electronics (EE 542), Networks I (EE 220), Networks
I Lab (EE 221), Networks II (EE 320), Electronics (EE 333), Electronics
Lab (EE 334), Computer Interfacing (EE 412), Digital Electronics Fundamentals
(EMCS 312), Calculus I (EMCS 101), Calculus II (EMCS 102), Active and Passive
Circuits (ESC 252), Electromagnetic Phenomenon (ESC 202), Circuits Lab
(EE 300), and Tech Math II (TC 101).
EXTERNAL FUNDING
K. M. Walsh, R. Baldwin, R. Keynton, and J. Naber, "An Intergrated Monolithic Capillary Electrophoresis System with Electrochemical Detection", NSF XYZ-on-a-chip Program, $1,000,000 ($520,000 NSF, $480,000 UL cost share), Oct. 1999 - Sept. 2002.
K. M. Walsh and J. F. Naber, "Development of MEMS for DOE Applications", DOE EPSCoR, $162,454 ($43,468 DOE, $118,985 UL cost share), Oct. 1999 - Sept. 2000.
R. W. Cohn, D. L. Chenoweth, K. M. Walsh, L. G. Hassebrook (U. of Kentucky), Extension of Technology Base in Optical and Opto-electronic correlators, National Aeronautics and Space Administration through Western Kentucky University, NCC5-222, $250,000. 1 July 1997 - 30 June 1999.
W. K. Pitts (67%) and K. M. Walsh (33%), Development of Gas Microstructure Detectors for Gamma-Ray Telescopes, NASA, $420,000, ($420,000 NASA, $0 UL cost sharing), 1996-1999.
W. K. Pitts (40%), K. M. Walsh (30%) and H. L. Cox (30%), Development of Microfabricated Radiation Sensor Systems, Kentucky DEPSCoR Program, $929,277, ($619,518 DOD, $309,759 UL cost sharing), 1996-1999.
K. M. Walsh (100%), Microfabrication Services, Lexmark International Inc., $5,000, ($5,000 Lexmark, $0 UL cost-sharing), 1996-97.
K. M. Walsh (45%), T. R. Hanley (10%), and W. K. Pitts (45%), An Advanced Undergraduate Laboratory for Microfabrication, NSF, Division of Undergraduate Education, ILI-LLD Program, $373,382 ($217,273 NSF, $156,109 UL cost-sharing), 1995-1998.
K. M. Walsh (100%), Microfabrication of Vias for Ink Jet Printing, Lexmark International Inc., $44,644, ($36,676 Lexmark, $7,968 UL cost-sharing), 1995-1996.
R. W. Cohn (50%) and K. M. Walsh (50%), Laser Beam-Shaping Using Micro-Topographic Relief Patterns in Photoresist, Kentucky Space Grant Consortium, $5,110 ($3,500 agency, $1,610 UL cost-sharing), June 1 1995 - May 31 1996.
K. M. Walsh (50%) and W. K. Pitts (50%), Microfabrication of Advanced Radiation Detectors, Kentucky NSF/EPSCoR Experimental Systemic Initiatives (ESI) Program, $476,889, ($238,445 NSF, $238,444 UL and industry cost-sharing), 1994-1995.
R. W. Cohn, D. L. Chenoweth, K. M. Walsh, and L. G. Hassebrook (25% each), Technology Base in Optical and Optoelectronic Correlators, NASA EPSCoR Program, $781,012 ($375,000 NASA, $406,012 UL cost-sharing), 1994-1997.
K. M. Walsh (100%), Fabrication of a Prototype Micromachined Silicon Nozzle Plate for Ink Jet Printing, Lexmark International, $26,846, ($11,625 Lexmark, $15,221 UL cost-sharing) Jan. 1994 - Dec. 1994.
R. E. Stewart, J. C. Watters, H. R. Leep, T. R. Hanley, K. M. Walsh, T. M. Murray, M. Fleischman, J. P. Mohsen, R. A. Matthews, Energy Analysis and Diagnostic Center (EADC), University City Science Center, $88,000, ($56,504 agency, $31,808 UL cost-sharing), Oct. 1993 - Oct. 1994.
H. T. Henderson, J. H. Nevin, W. H. Hsieh, K. M. Walsh, and J. Dury,
Research
in Silicon Micromachining for Development of Smart Microaccelerometers,
Sensotec and the Ohio Edison Program, $150,000, 1989-1991 (during this
period, K. Walsh was serving as a graduate research assistant under Dr.
H. Thurman Henderson at the Center for Microelectronic Sensors and Microstructures
at the University of Cincinnati).
PUBLICATIONS
R. W. Cohn, S. F. Lyuksyutov, K. M. Walsh, and M. M. Crain, "Nanolithography Considerations for Multi-Passband Grating Filters", Optical Review, Vol. 6, No. 4, pp. 345-354, 1999.
J. B. Hutchins, M. D. Martin, W. K. Pitts, K. M. Walsh, S. Belolipetshiy, and H. L. Cox, "A Low-Cost High Performance Cleanroom Enclosure", IEEE Transactions on Education, Vol. 42, No. 2, pp. 144-146, May 1999.
K. M. Walsh, T. R. Hanley, W. K. Pitts, M. Crain, J. Cole, D. Hensel, J. Hernandez, and C. Foreman, "Development of a New Microfabrication/MEMS Course at the University of Louisville", Proceedings of the 1999 IEEE University Government Industry Microelectronics Symposium, Minneapolis, MN, pp. 26-32, June 20-23, 1999.
K. M. Walsh, H. T. Henderson and G. N. DeBrabander, "A Novel Bonding Technique for Micromachined Accelerometers using Low Temperature Glass", Sensors and Actuators, pending.
K. M. Walsh and J. P. Mohsen, "Modelling and Characterization of a Microaccelerometer", International Journal of Modelling and Simulation, accepted.
K. M. Walsh, W. K. Pitts, N. W. Jenkins, K. P. Browne and K. Solberg, "An Economical Technique for Fabricating Single-Layer Planar Devices using Photolithography", Review of Scientific Instruments, pending.
S. Hunter, K. Pitts, K. Walsh, et al, “Development of Gas Micro-Structure Detectors for Gamma-Ray Astronomy”, Proceedings of the Fourth Compton Symposium, American Institute of Physics (AIP) Conference Proceedings 410, pp. 1606-1610, Williamsburg VA, April 1997.
H. L. Cox, K. M. Walsh and W. K. Pitts, "Laser Microfabrication of a Multielement Array in Polyimide for X-ray Imaging", Proceedings of the OSA Annual Meeting, Long Beach, CA., Oct. 12-17, 1997.
K. Pitts, S. Belolipetsky, K. Walsh, H. Cox, et al, “Development of Large Area Gas MicroStructure Detectors for High Resolution Gamma-Ray Telescopes”, 1997 Meeting of the American Astronomical Society (AAS) High Energy Astrophysics Division, Estes Park, CO, p. 97, Nov. 4-7, 1997.
K. M. Walsh, T. R. Hanley, W. K. Pitts, D. Hensel, J. Hernandez, M. Crain, and J. Cole, "Microfabrication Activities at the University of Louisville", Proceedings of the 1997 IEEE University Government Industry Microelectronics Symposium, pp. 26-32, Rochester, NY, July 20-23, 1997.
S. Hunter, K. Pitts, S. Belolipetsky, K. Walsh, H. Cox, et al, “Realizing and Achieving the Science Goals of the GLAST Mission”, 1997 Meeting of the American Astronomical Society (AAS) High Energy Astrophysics Division, Estes Park, CO, p. 15, Nov. 4-7, 1997.
K. M. Walsh and S. Sayeed, "Surface Micromachined Deformable Devices Using the MUMPS Process", Proceedings of the 1996 IEEE SouthEastCon Conference, April 11-14, Tampa, Florida, 1996.
K. M. Walsh, N. W. Jenkins, K. P. Browne, M. Martin, W. K. Pitts and K. Solberg, "An Economical Technique for Fabricating Single-Layer Microstructures using Photolithography", 1996 ASEE Southeastern Section Meeting, pp. 126-133, April 14-16, Gatlinburg, TN, 1996.
W. K. Pitts, K. M. Walsh, K. Solberg, K. P. Browne, N. Jenkins, M. Martin, and B. P. Retenellar, "Development of MSGC and MGC Detectors", Nuclear Physics Division Meeting of the American Physical Society, Bloomington, IN., Oct. 25-28, 1995.
P. D. Voegel, R. P. Baldwin, K. M. Walsh, "Dual Electrodes for use in Capillary Electrophoresis", Federation of Analytical Chemistry and Spectroscopy Societies Meeting, Cincinnati, Ohio, October 17, 1995.
R. W. Cohn, K. M. Walsh, and A. A. Vasiliev, "Patterned Diffusers in Photoresist for Full Complex Modulation", 1995 OSA Annual Meeting/ILS-XI, Portland, Oregon, p. 91, September, 1995.
K. M. Walsh, J. P. Mohsen, M. Miracle, T. Gornet, "Finite Element Modelling of a Miniature Micromachined Accelerometer", Proceedings of the IASTED International Conference on Modelling and Simulation, pp. 81-83, May 1993.
K. M. Walsh, J. P. Mohsen, M. Miracle, T. Gornet, "Using FEA in the Design and Analysis of a Miniature Micromachined Accelerometer", Proceedings of the ASEE 1993 Southeast Conference, pp. 206-217, April 1993.
K. M. Walsh, H. T. Henderson and G. N. DeBrabander, "A Fully Packaged Silicon Micromachined Piezoresistive Accelerometer", Proceedings of the IEEE SoutheastCon '92 Conference, pp. 752-756, April 1992.
K. M. Walsh and H. T. Henderson, "Development and Characterization of an Advanced Silicon Micromachined Accelerometer/Vibration Sensor for Vehicle Condition Monitoring", Proceedings of the Third Annual Health Monitoring Conference for Space Propulsion Systems, pp. 139-150, November 1991.
K. M. Walsh, S. V. Bell, P. B. Aronhime, "Integrating PSPICE into the Undergraduate Electronics Curriculum", Proceedings of the ASEE 1991 Annual Southeast Conference, pp. 113-116, April 1991.
K. M. Walsh and H. T. Henderson, "A Silicon Micromachined Piezoresistive Accelerometer for Health and Condition Monitoring", Proceedings of the Second Annual Health Monitoring Conference for Space Propulsion Systems, pp. 381-391, November 1990.
H. T. Henderson, J. H. Nevin, J. T. Boyd, W. M. Hsieh, K. M. Walsh, J. G. Dury, N. J. Loesing, and G. Debrabander, "Silicon Microsensor Technology for Space Propulsion Health Monitoring", Proceedings of the NASA Health Monitoring Conference for Space Propulsion Systems, November 1989.
K. M. Walsh, "Z-80 CPU Bus Monitor/Analyzer", Proceedings of the
1988 IEEE SoutheastCon Conference, pp. 181-185, April 1988.
PAPERS/ABSTRACTS PRESENTED
S. Sharma, M. Sunkara, E. C. Dickey, M. M. Crain, S. F. Lyuksyutov, K. M. Walsh, and R. W. Cohn, "Selective Nitridation of Silicon Substrates using Microwave Nireogen Plasma", 1999 AIChE Annual Meeting, Sept., 1999.
R. W. Cohn, S. F. Lyuksyutov, K. M. Walsh, M. M. Crain, S. Sharma, P. Koduri, and M. Sunkara, "Spatially Modulated Bragg Gratings for Multi-Passband Filtering", Bragg Conference (??), 1999.
R. W. Cohn, S. F. Lyuksyutov, K. M. Walsh and M. M. Crain, "Nanofabricated Gratings for Wavelength Division Multiplexing", Gordon Research Conference on Chemistry and Physics of Nanostructure Fabrication, Tilton, NH, June 22, 1998.
R. W. Cohn, K. M. Walsh, M. Liang, A. A. Vasiliev, W. Y. Liu, and D. L. Hill, "Recent Advances in Pseudorandom Encoding of Full-Complex Modulation", Gordon Research Conference on Optical Processing and Holography, Plymouth, N. H., June 26-30, 1995.
R. P. Baldwin, K. M. Walsh, M. Z. Luo, P. D. Voegel, and K. S. Samons, "Dual Electrode Amperometric Detection in CE", Seventeenth International Symposium on Capillary Chromatography and Electrophoresis, Wintergreen, VA., May 7-11, 1995.
R. W. Cohn, K. M. Walsh and A. Vasilievetc, "Technology Base in Optical and Opto-Electronic Correlators", First Annual Kentucky EPSCoR Conference, Lexington, Kentucky, May 8, 1995.
K. M. Walsh, "Development of a Macro-microfabrication Laboratory", 1995 ASEE Southeastern Section Meeting, Biloxi, Mississippi, April 9-11, 1995.
K. M. Walsh and S. Sayeed, "Design of Microelectromechanical Structures
using Surface Micromachining Techniques", 1994 Multi-User MEMS Processes
Conference, Chicago, Ill., Oct. 21, 1994.
TECHNICAL REPORTS
W. K. Pitts, K. M. Walsh, K. Solberg, K. P. Browne, N. Jenkins, and B. P. Retenellar, "Development of Microstrip Gas Chambers", Indiana University Cyclotron Facility Annual Report, 1995.
K. M. Walsh, "Fabrication of Silicon Micromachined Nozzle Plates for Ink Jet Printing", Technical Report to Lexmark International, April, 1995.
W. K. Pitts, K. M. Walsh, K. Solberg, K. P. Browne, and N. Jenkins, "Development of Microstrip Gas Chambers", Indiana University Cyclotron Facility NEWSLETTER, Number 55, pp. 32-34, April 1995.
H. T. Henderson and K. M. Walsh, "Research in Silicon Micromachining for Development of Smart Microaccelerometers", Technical Report to Sensotec Corp., June 1992.
K. M. Walsh and H. T. Henderson, "A Smart Silicon Microaccelerometer
for Health Monitoring Applications", Health Monitoring Technology Center
Newsletter, Number 5, p. 5, October 1990.
PATENTS
R. W. Cohn, A. A. Vasiliev, and K. M. Walsh, "Method and Apparatus for Patterning Microtopographic Relief Surfaces in Photoresist," U. S. Patent Pending, Ser No. 08/866783, 30 May 1997.
W. K. Pitts, K. M. Walsh, and K. Solberg, "Radiation Detector Based on Charge Amplification in a Gaseous Medium," Patent Number 5,614,722, March 25, 1997.
W. K. Pitts, K. M. Walsh, and K. Solberg, "Optical Imaging System Utilizing a Charge Amplification Device," patent no. 5,602,397, Feb. 11, 1997.
R. W. Cohn, K. M. Walsh, and A. A. Vasiliev, "Patterned Diffusers in
Photoresist for Full Complex Modulation," patent disclosure, February 27,
1995, (in process of being filed by the US Air Force).
PUBLISHED BOOK REVIEWS
K. M. Walsh, "Book Review of Microcomputers and Laboratory Instruments",
Computers
and Mathematics with Applications, Vol. 14, No. 9-12, p. 947, 1987.
INVITED PRESENTATIONS
K. Walsh, “Microfabrication Activities at the University of Louisville”, Louisville IEEE Section, Louisville, Ky, April 3, 1998.
K. M. Walsh, "Micromachining for Ink-Jet Printers", Lexmark International, Lexington, KY, April 29, 1996.
K. M. Walsh, "Silicon Micromachined Sensor Technology", 1994 Kentucky Technical Symposium and Expo, sponsored by ISA/IEEE, Louisville, Ky., May 25, 1994.
K. M. Walsh, "Microfabrication Techniques for Radiation Detectors", Indiana University Radiation Group Meeting, Jan. 28, 1994.
K. M. Walsh, "Use of Anisotropic Etching in the Manufacturing of Nozzle Plates", Lexmark International, Inc., Lexington, Kentucky, Sept. 16, 1993.
K. M. Walsh, "Applications of Micromachining to Ink Jet Technology", Lexmark International, Inc., Lexington, Kentucky, April 8, 1993.
K. M. Walsh, "A Microaccelerometer Case Study", Delco Electronics, General Motors Corporation, Kokomo, Indiana, Jan. 26, 1993.
K. M. Walsh, "Micromachining Technology and Its Applications", Computer Science and Engineering PhD Seminar, University of Louisville, Sept. 3, 1992.
K. M. Walsh, "Design and Development of a Second Generation Microaccelerometer", IAMS Microfabrication Technology Transfer Seminar, Institute of Advanced Manufacturing Sciences, Cincinnati, Ohio, Oct. 24, 1991.
K. M. Walsh, "Batch Fabrication of Micromachined Sensors", NASA Health Monitoring Seminar Series, Cincinnati, Ohio, Jan. 10, 1991.
K. M. Walsh, "A Piezoresistive Micromachined Accelerometer", IAMS Microfabrication Technology Transfer Seminar, Institute of Advanced Manufacturing Sciences, Cincinnati, Ohio, Oct. 25, 1990.
K. M. Walsh, "Micro/Macro Semiconductor Mechanics", IAMS Steering
Committee Meeting, Institute of Advanced Manufacturing Sciences, Cincinnati,
Ohio, Dec. 6, 1990.
DONATIONS AND EQUIPMENT GRANTS
K. M. Walsh and M. Sunkara, $80,000, Chemical Vapor Deposition Systems, Amp Corporation, 1999.
K. M. Walsh, J. F. Naber, and D. Chenoweth, $200,000, Semiconductor Test Equipment, Micron Technology, 1999.
K. M. Walsh, $2,000, Silicon Wafers, Lexmark International, 1999.
K. M. Walsh, $2,000, Memory Modules, Micron Technology, 1998.
K. M. Walsh, High Power Inspection Microscope with Computerized Stage and Pattern Recognition Software, Carl Zeiss Corporation, $68,250, 1996.
K. M. Walsh, Silicon Wafers, Bunny Suits, and Gowning Video, Twinstar, $10,000, 1996-97.
K. M. Walsh, Thermocompression Wirebonder and Bond Strength Tester, DuPont Electronics, $10,000, 1996.
K. M. Walsh, Diffusion Sources and Quartzware, Carborundum Company, $3,000, 1996.
K. M. Walsh, Gas Cabinets, United Distillers, $20,000, 1996.
K. M. Walsh, Pyralin Polyimide, DuPont Electronics, $1,000, 1995.
K. M. Walsh, Ultradel 7505 Polyimide, Amoco Chemical, $1,000, 1995.
K. M. Walsh, Kasper Mask Aligner, Lexmark International, $30,000, 1994.
K. M. Walsh, Microautomation Diamond Dicing Saw, Delco Electronics, $50,000, 1994.
K. M. Walsh, Leitz Microscope, Delco Electronics, $20,000, 1994.
K. M. Walsh, RIE System with Turbo Pump and Chiller, Delco Electronics, $110,000, 1994.
K. M. Walsh, Model 4123 Universal Wedge Bonder for Microwave, Hybrid, and IC Applications, Kulicke and Soffa Industries, $15,000, 1994.
K. M. Walsh, High Power Inspection Microscope and Camera System, Carl Zeiss Corporation, $18,000, 1993-1994.
K. M. Walsh, Wentworth MP-900 Probe Station, Delco Electronics, $5000, 1993-1994.
K. M. Walsh, Tektronic 576 Curve Tracer, Delco Electronics, $2500, 1993-1994.
T. G. Cleaver, P. B. Aronhime, J. D. Cole, J. C. Hill, J. Lilly, K. M. Walsh, Computer Aided Design in Electrical Engineering, Mentor Graphics Corp., $6,800,000, 1993.
K. M. Walsh, 1400-27 Microposit Photoresist, Microposit Primer, 351 Microposit Developer, 1650 Microposit Stripper, Shipley Company, $300, 1993.
K. M. Walsh, 1650 Microposit Photoresist and FSC-M Microposit Surface Coating, Shipley Company, $750, 1992.
K. M. Walsh, 7740 Glass Powder, 7585 Glass Sputtering Target, 7723 Glass Sealing Frit, and 7585 Glass Powder, Corning Glass Works, $1000, 1992.
K. M. Walsh, Diamond Dicing Blades, Norton Company, $500, 1992.
K. M. Walsh, Model 500 Cannon Mask Aligner, Delco Electronics, $30,000, 1991-1992.
K. M. Walsh, Microelectronic Post-Processing Evaluation and Packaging Equipment, Assembly Technologies, $93,600, 1990-1991.
K. M. Walsh, PSPICE Microelectronic Circuit Analysis and Filter Designer
Simulation Tools for Integration into the Engineering Curriculum at the
University of Louisville, MicroSym Corporation, $30,150, 1990.
AWARDS
UofL Presidential Young Investigator Award, 1994.
Speed Alumni Scholar for Research Award, Oct. 24, 1998-2000.
OTHER
1999- Reviewer for 1999 ASME Bio-MEMS Conference.
1997- Reviewer for Engineering Design and Automation Journal.
1997- Reviewer for The Journal of Microelectromechanical Systems.
1996- Reviewer for NSF Chemical Reaction Processes Program.