Cleanroom Virtual Tour


floor plan

Cleanroom Facilities

Cleanroom Equipment

  1. Gowning Cabinets
  2. Leitz Microscope
  3. Ohaus Digital Scale
  4. Veeco Four Point Probe
  5. Tencor Profilometer
  6. Heidleberg LASER Pattern Generator
  7. Suss Aligner/Bonder
  8. AB-M Mask Aligner
  9. Solitec Spinner
  10. Hotplates
  1. VLF Wet Processing Station
  2. Solvent Cabinets
  3. Acid Cabinets
  4. Zeiss Microscope
  5. Computer
  6. Stereo Scope
  7. Filmetrics Thickness Monitor
  8. Storage Cabinet
  9. March RIE
  10. DH Hydrogen Gas Generator
  1. Fume Hoods
  2. STS DRIE
  3. Lindberg Three Zone Furnases
  4. Lindberg Furnase Controlers
  5. Technics RF/DC Sputterer
  6. Suss Megasonic Wafer Cleaner
  7. Suss Wafer Level Bonder
  8. Eye Wash and Safety Shower
  9. YES Reversal System

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